P. Rai-Choudhury

• Handbook of microlithography, micromachining, and microfabrication
• MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
• Handbook of Microlithography, Micromachining and Microfabrication
• Handbook of Micromachining and Microfabrication (Materials and Devices Series, 2)
• Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1 Vol. 1