Harry J. Levinson

• Lithography process control
• Principles of lithography
• Principles of Lithography (SPIE PRESS Monograph Vol. PM97) (Spie Press Monograph)
• Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
• Extreme Ultraviolet Lithography
• Optical microlithography XXI
• Optical microlithography XXI
• Optical microlithography XXII
• Principles of Lithography, 3rd Ed