Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

by R. Ekwal Sah

857 pages· 2009· ISBN 9781566777100
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The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.

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