Multi-Wafer Rotating MEMS Machines

Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

by Jeffrey Lang

456 pages· 2009· ISBN 9780387777474
About
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

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