ULSI semiconductor technology atlas

ULSI semiconductor technology atlas

by George T. T. Sheng, Chih-Hang Tung, Chih-Yuan Lu

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Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.

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