Microelectronics Technology and Devices--SBMICRO 2007

Microelectronics Technology and Devices--SBMICRO 2007

by João Antonio Martino

599 pages· 2007· ISBN 9781566775656
About
The SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.

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